Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411409 | Aromatic underlayer | Sheng Liu, James F. Cameron, Shintaro Yamada, Keren Zhang, Daniel Greene +3 more | 2025-09-09 |
| 12313971 | Coated underlayer for overcoated photoresist | Anton Chavez, Shintaro Yamada | 2025-05-27 |
| 12287576 | Underlayer compositions and patterning methods | Joshua Kaitz, Sheng Liu, Li Cui, Shintaro Yamada, James F. Cameron +2 more | 2025-04-29 |