Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12306387 | Light source apparatus, lithography apparatus, and article manufacturing | — | 2025-05-20 |
| 12275215 | Liquid storage member for coating tools | Saki TANAKA, Yuichi Inagawa | 2025-04-15 |