Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386342 | Holistic analysis of multidimensional sensor data for substrate processing equipment | Yudong Hao, Shifang Li, Andreas Schulze | 2025-08-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386342 | Holistic analysis of multidimensional sensor data for substrate processing equipment | Yudong Hao, Shifang Li, Andreas Schulze | 2025-08-12 |