Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12255061 | Substrate processing method | Tetsuya EMOTO, Shigeru Yamamoto, Kenji Edamitsu, Keiji Iwata, Yuya KAWAI +1 more | 2025-03-18 |
| 12211687 | Substrate treatment apparatus and substrate treatment method | Shigeru Yamamoto, Keiji Iwata, Kenji Edamitsu, Yuya KAWAI, Kenichi Ito | 2025-01-28 |