Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12385138 | Plasma-enhanced deposition of film stacks | Jason Dirk Haverkamp, Pramod Subramonium, Joseph L. Womack, Keith Fox, John B. Alexy +5 more | 2025-08-12 |
| 12217985 | Wafer placement correction in indexed multi-station processing chambers | Stephen Topping | 2025-02-04 |