Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340974 | Hydrogen supply device, and ion beam irradiation apparatus equipped therewith | Yuya HIRAI, Suguru ITOI, Yuta IWANAMI | 2025-06-24 |
| 12272588 | Wafer clamping method and semiconductor manufacturing apparatus | Takayuki Murayama, Yuya HIRAI | 2025-04-08 |