Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424421 | Apparatus and method for controlling a substrate temperature | Arata Tatsumi, Kenji Sekiya, Naoya Aikawa, Masaya Takanashi | 2025-09-23 |
| 12354901 | Stage and manufacturing method thereof | Hibiki YOKOYAMA, Jun Futakuchiya, Noriyoshi Kaneda, Michiyoshi SONE | 2025-07-08 |