Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12349241 | Ceramic heater and method of manufacturing the same | Shuichiro Motoyama | 2025-07-01 |
| 12283511 | Member for semiconductor manufacturing apparatus | Tatsuya KUNO, Taro USAMI | 2025-04-22 |
| 12237156 | Wafer placement table | Tatsuya KUNO, Seiya INOUE | 2025-02-25 |
| 12191183 | Wafer placement table and method of manufacturing the same | Yuji AKATSUKA | 2025-01-07 |