Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12366812 | Detection apparatus, detection method, exposure apparatus and article manufacturing method | Hironori Maeda, Ryo Takai | 2025-07-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12366812 | Detection apparatus, detection method, exposure apparatus and article manufacturing method | Hironori Maeda, Ryo Takai | 2025-07-22 |