Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12345517 | Measuring device, exposure device, and measurement method | Satoshi Takahashi | 2025-07-01 |
| 12334404 | Surface position detection device, exposure apparatus, substrate-processing system, and device-manufacturing method | Satoshi Takahashi | 2025-06-17 |