Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12287569 | Pellicle film for photolithography, pellicle, photolithography mask, photolithography system, and method of producing pellicle film for photolithography | Yousuke ONO, Ryohei Ogawa, Atsushi Okubo, Kazuo Kohmura, Atsuko Sekiguchi +3 more | 2025-04-29 |