Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332107 | Physical quantity detection device | Nobuaki GORAI, Akira Uenodan, Naoki Saito | 2025-06-17 |
| 12300525 | Controlling method and substrate transport module | Hiroto Sato, Mitsuru Obara | 2025-05-13 |