Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12222490 | Metrology system, and apparatus including primary mirror | Yuto Owaki, Atsushi Kato, Noboru Kawaguchi | 2025-02-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12222490 | Metrology system, and apparatus including primary mirror | Yuto Owaki, Atsushi Kato, Noboru Kawaguchi | 2025-02-11 |