Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12297376 | Silica particle and production method therefor, silica sol, polishing composition, polishing method, method for producing semiconductor wafer and method for producing semiconductor device | Eiji DEJIMA, Naoko Sumitani, Tomohiro Kato, Takeshi Sawai | 2025-05-13 |