Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400830 | RF sputtering of multiple electrodes with optimized plasma coupling through the implementation of capacitive and inductive components | Ken Nauman, Masahiro Watanabe, Michael S. Thornton, Michael Meyer | 2025-08-26 |