Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372879 | Apparatuses and methods for diffraction base overlay measurements | Kazuko Tsuchiya | 2025-07-29 |
| 12265335 | Alignment-overlay mark and method using the same | Kazuko Yamashita | 2025-04-01 |