Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362136 | Apparatus and method for measuring pedestal voltage uniformity in plasma processing chambers | — | 2025-07-15 |
| 12347677 | Enhanced ignition in inductively coupled plasmas for workpiece processing | Shawming Ma | 2025-07-01 |
| 12272532 | Inductive broad-band sensors for electromagnetic waves | Alexandre De Chambrier, Ivan Shkurenkov | 2025-04-08 |