Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12416482 | Position measuring device and substrate processing apparatus including the same | Bo Ram Chan Sung, Dong Yun Lee | 2025-09-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12416482 | Position measuring device and substrate processing apparatus including the same | Bo Ram Chan Sung, Dong Yun Lee | 2025-09-16 |