Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387915 | Lower plasma exclusion zone ring for bevel etcher | Keechan Kim, Gregory Sexton | 2025-08-12 |
| 12332042 | In-situ wafer thickness and gap monitoring using through beam laser sensor | Goon Heng WONG, Xuefeng Hua, Anthony Paul Van Selow, Daniel Torres | 2025-06-17 |