Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424470 | Systems and methods for autonomous process control and optimization of semiconductor equipment using light interferometry and reflectometry | — | 2025-09-23 |
| 12341040 | Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health check | Richard M. Blank, Peter Thaulad, Mark E. Emerson, Arulselvam Simon Jeyapalan, Marco Piccigallo | 2025-06-24 |
| 12217945 | Sorption chamber walls for semiconductor equipment | Richard A. Gottscho | 2025-02-04 |