Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272570 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Dengliang Yang, David Cheung, Gnanamani Amburose, Eunsuk Ko, Wei Luo +1 more | 2025-04-08 |
| 12272571 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Dengliang Yang, David Cheung, Gnanamani Amburose, Eunsuk Ko, Wei Luo +1 more | 2025-04-08 |
| 12211709 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Dengliang Yang, David Cheung, Gnanamani Amburose, Eunsuk Ko, Weiyi Luo +1 more | 2025-01-28 |