Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372872 | Extreme ultraviolet (EUV) lithography using an intervening layer or a multi-layer stack with varying mean free paths for secondary electron generation | Andrew Xiao Liang, Nader Shamma, Rich Wise, Akhil Singhal, Arpan Mahorowala +1 more | 2025-07-29 |
| 12322588 | Stimulus responsive polymer films and formulations | Diane Hymes, Stephen M. Sirard | 2025-06-03 |