Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387964 | Matched tcr joule heater designs for electrostatic chucks | — | 2025-08-12 |
| 12249490 | Single crystal metal oxide plasma chamber component | Lin Xu, Douglas DETERT, John Daugherty, Pankaj HAZARIKA, Satish SRINIVASAN +5 more | 2025-03-11 |