Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398275 | Group V element-containing film compositions and vapor deposition of Group V element-containing film | Jooho LEE | 2025-08-26 |
| 12371787 | Method of forming dielectric films, new precursors and their use in the semi-conductor manufacturing | Daehyeon Kim, Jooho LEE | 2025-07-29 |
| 12312677 | Step coverage using an inhibitor molecule for high aspect ratio structures | Jooho LEE | 2025-05-27 |