Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278132 | Substrate transfer robot for transferring substrate in vacuum chamber | Chang Seong Lee, Seung Young Baek, Moon Gi Hur | 2025-04-15 |
| 12255090 | Apparatus for transferring substrate in vacuum chamber | Chang Seong Lee, Chang Hyun Jee, Sang Hwi Ham | 2025-03-18 |
| 12234106 | Apparatus for transferring substrate in vaccum chamber | Chang Seong Lee, Chang Hyun Jee, Sang Hwi Ham | 2025-02-25 |