Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12346017 | Substrate with multilayer reflective film, reflective mask blank, reflective mask, and method for manufacturing semiconductor device | — | 2025-07-01 |
| 12313968 | Reflective mask blank, reflective mask, and method for manufacturing semiconductor device | Tsutomu Shoki | 2025-05-27 |