Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381079 | Method of manufacturing semiconductor device, substrate processing apparatus, recording medium and method of processing substrate | Hideki Horita | 2025-08-05 |
| 12359314 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Shin SONE, Hiroki HATTA | 2025-07-15 |