Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12195853 | Substrate processing apparatus, method of manufacturing semiconductor device, substrate processing method, and recording medium | Motonari Takebayashi | 2025-01-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12195853 | Substrate processing apparatus, method of manufacturing semiconductor device, substrate processing method, and recording medium | Motonari Takebayashi | 2025-01-14 |