Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406197 | Prediction and metrology of stochastic photoresist thickness defects | Anatoly Burov, Kunlun Bai, Pradeep Vukkadala, Cao Zhang, John S. Graves +2 more | 2025-09-02 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406197 | Prediction and metrology of stochastic photoresist thickness defects | Anatoly Burov, Kunlun Bai, Pradeep Vukkadala, Cao Zhang, John S. Graves +2 more | 2025-09-02 |