Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12227848 | Substrate processing apparatus, method for processing substrate, and method for manufacturing semiconductor device | — | 2025-02-18 |
TF
Takanori FUKUSUMI
Overall (2025): #200,873 of 469,880Top 45%
1
Patents 2025