Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198968 | Electrostatic chuck and substrate fixing device | Kentaro Kobayashi, Mizuki Watanabe, Kohei Yamaguchi | 2025-01-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198968 | Electrostatic chuck and substrate fixing device | Kentaro Kobayashi, Mizuki Watanabe, Kohei Yamaguchi | 2025-01-14 |