Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394627 | Substrate polishing system | Hee Sung Chae, Seung Eun Lee | 2025-08-19 |
| 12186900 | Substrate cleaning line and substrate cleaning system comprising the same | Hee Sung Chae, Seung Eun Lee | 2025-01-07 |