Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278109 | Etching apparatus and etching method | Kazuhito Higuchi, Susumu Obata, Mitsuo Sano | 2025-04-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278109 | Etching apparatus and etching method | Kazuhito Higuchi, Susumu Obata, Mitsuo Sano | 2025-04-15 |