Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428581 | Chemical mechanical polishing slurry composition for polishing boron silicon compound, chemical mechanical polishing method and method of fabricating semiconductor device using the same | Cheolmin Shin, Hyun Goo KANG, Jong-Young Cho, Ungyu PAIK, Dong-Hyeok Kim | 2025-09-30 |