Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347714 | Wafer positioning and correction method, system, and device | Rongsheng Lyu, Han Zhang, Zuojun Shen | 2025-07-01 |
| 12288712 | Wafer calibraiton method for a wafer calibration device | Han Zhang, Rongsheng Lyu, Zuojun Shen | 2025-04-29 |