Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374534 | Member for semiconductor manufacturing apparatus | Hiroshi Takebayashi | 2025-07-29 |
| 12300476 | Wafer placement table | Hiroshi Takebayashi | 2025-05-13 |
| 12211725 | Electrostatic chuck assembly | Hiroshi Takebayashi, Jyunya WAKI | 2025-01-28 |