Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12284729 | Ceramic heater with shaft | Hiroshi Takebayashi, Tatsuya KUNO | 2025-04-22 |
| 12230526 | Electrostatic chuck heater | Tatsuya KUNO, Hiroshi Takebayashi | 2025-02-18 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12284729 | Ceramic heater with shaft | Hiroshi Takebayashi, Tatsuya KUNO | 2025-04-22 |
| 12230526 | Electrostatic chuck heater | Tatsuya KUNO, Hiroshi Takebayashi | 2025-02-18 |