Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322577 | Plasma baffle, substrate processing apparatus including the same, and substrate processing method using the same | Hakyoung Kim, Dowon Kim, Youngjin Noh, Chulwoo Park, Minyoung Hur | 2025-06-03 |