Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381106 | Systems and methods of seasoning electrostatic chucks with dielectric seasoning films | Akhil Singhal, Zeqiong Zhao, Sang Jin Kim, Zhijun Jiang, Deenesh Padhi +1 more | 2025-08-05 |
| 12315724 | Helium-free silicon formation | Zeqiong Zhao, Sang Jin Kim, Akhil Singhal, Zhijun Jiang, Deenesh Padhi +1 more | 2025-05-27 |
| 12211908 | Profile shaping for control gate recesses | Akhil Singhal, Sang Jin Kim, Zeqiong Zhao, Zhijun Jiang, Deenesh Padhi +1 more | 2025-01-28 |