Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12415719 | MEMS sensor with particle filter and method for producing it | Barbara Angela Glanzer, Marten Oldsen, Francesco Solazzi, Carsten von Koblinski | 2025-09-16 |
| 12372780 | 3D dome wafer-level package for optical mems mirror with reduced footprint | Ulf Bartl, Kurt Sorschag | 2025-07-29 |