Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12197133 | Tool control using multistage LSTM for predicting on-wafer measurements | Dung Phan, Robert J. Baseman, Ramachandran Muralidhar, Nam H. Nguyen | 2025-01-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12197133 | Tool control using multistage LSTM for predicting on-wafer measurements | Dung Phan, Robert J. Baseman, Ramachandran Muralidhar, Nam H. Nguyen | 2025-01-14 |