Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424416 | Substrate processing apparatus and parameter acquisition method | Hiroki Endo | 2025-09-23 |
| 12200826 | Substrate processing apparatus and noise impact reducing method | — | 2025-01-14 |