Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403508 | Liquid chemical supply module and substrate processing apparatus including the same | Seungtae YANG, Sangwoo PARK, Youngjoon Han, Gi Hun CHOI | 2025-09-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403508 | Liquid chemical supply module and substrate processing apparatus including the same | Seungtae YANG, Sangwoo PARK, Youngjoon Han, Gi Hun CHOI | 2025-09-02 |