Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12399516 | Flow ratio controller system operating in alternative control modes | Patrick Lowery, Maximilian Martin Gundlach, Andrew Price | 2025-08-26 |
| 12327750 | Electrostatic chuck device, pressure calculation method and program | Lei Ma, Andrew Price | 2025-06-10 |
| 12306644 | Hybrid flow ratio controller system with channels for flow ratio control, flow rate or pressure control, and overflow control | Maximilian Martin Gundlach, Patrick Lowery | 2025-05-20 |