Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315704 | Plasma processing apparatus, and method and program for controlling elevation of focus ring | Tokuhisa OIWA | 2025-05-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315704 | Plasma processing apparatus, and method and program for controlling elevation of focus ring | Tokuhisa OIWA | 2025-05-27 |