Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12338529 | Substrate processing apparatus, process vessel, method of manufacturing semiconductor device and non-transitory tangible medium | Shinya Morita | 2025-06-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12338529 | Substrate processing apparatus, process vessel, method of manufacturing semiconductor device and non-transitory tangible medium | Shinya Morita | 2025-06-24 |