Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421609 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsuro SEINO, Takuya JODA | 2025-09-23 |
| 12278108 | Substrate processing method, method of manufacturing semiconductor device, non- transitory computer-readable recording medium and substrate processing apparatus | Kota KOWA | 2025-04-15 |