Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12311497 | Method for chemical mechanical polishing of a SiC wafer based on a magnetorheological elastic metal contact corrosion polishing pad | Jiabin LU, Da Hu, Zengquan Hu, Wenrui Liang, Zirong Huang | 2025-05-27 |