Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12399081 | Smart seals for monitoring and analysis of seal properties useful in semiconductor valves | Mookkan Periyasamy, Elizabeth Sassano, Otto J. Gregory, Godi Fischer, Tao Wei +2 more | 2025-08-26 |