Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332575 | Target supply system, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Fumio Iwamoto, Atsushi Ueda | 2025-06-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332575 | Target supply system, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Fumio Iwamoto, Atsushi Ueda | 2025-06-17 |